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niform and regular quantum dot arrays with precisely
controlled positions and sizes may serve as a template
for the next generation of nanoelectronic devices; this
promise has motivated many researchers to use self-assembled heteroepitaxial growth. Numerous theoretical, modeling and
experimental |
works have shown that unguided self-assembled
growth of quantum dots usually fails to realize perfectly ordered
dot arrays. Recently, more effort has been shifted to use guided
self-assembly through pre-patterning.
So far, several pre-patterning
procedures have been reported. It is
expected that through pre-patterning,
uniform and regular quantum dots
can be achieved. In reality, quantum
dots have been found to nucleate
at different positions even if an
ordered pre-patterned substrate is
used, often failing to produce the
one-to-one relation. Hence, reliably
and reproducibly achieving ordered
quantum dot arrays through surface
pre-patterning is still an unsolved
problem.
We have performed systematic three dimensional
computer simulations to
determine the growth windows for
achieving ordered quantum dot or
ring arrays through pre-patterning
substrate surfaces. In the modeled thin film/substrate system, the
pre-patterned substrate surface is considered to be fixed. A thin transition layer with a linearly varied mismatch strain covering the
pre-patterned substrate surface is introduced to model the wetting
effect. Here the focus is on the morphological evolution of the film
surface atop the wetting layer through diffusion and deposition.
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Our simulations show that for isotropic
thin film systems, concave patterning
in a squared array may lead to the
formation of ordered dots, whereas
convex patterning in a squared array
may initially lead to the formation
of ordered quantum rings, and then
a transition into quantum dots with
further growth. The evolution of the
surface chemical potential during
growth explains the formation
of the ordered surface structures.
However, for anisotropic thin film
systems, novel surface structures,
such as ordered quantum dot arrays
(Figure 1) and quantum-dot automata
arrays, fortress-enclosed quantumdot
automata arrays (Figure 2), can
be obtained by controlling the pre-patterning pitch distance and
growth rate. In addition, the quantum dot (ring) density, according
to the present study, can be significantly higher than the current
experimentally achieved dot densities. For example, for the Ge/Si
system, the dot density is predicted to be as high as 400 dots/
μm2. However, the current experimentally achieved dot density is only roughly 4~20 dots/μm2. Hence, there is still a large potential
and challenge to increase the dot (ring) density. It is expected that
the present work will provide a new guideline for controlling the
formation and self-assembly of novel surface structures.
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Contact person |
Assoc Prof YW Zhang
Tel: 6516 4877, Fax: 6776 3604
E-mail: msezyw@nus.edu.sg |
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